EESI Part #:
2300-00114
Description:
Plasma Tube Quartz
EESI Part #:
2300-00012
Description:
Harness Assembly, Sensor, 25.5"
EESI Part #:
2300-00013
Description:
Harness Assembly, Sensor, 12.0"
EESI Part #:
2300-00014
Description:
Harness Assembly, Sensor, 17.5"
EESI Part #:
2300-00015
Description:
Harness Assembly, Sensor, 26.5"
EESI Part #:
2300-00092
Description:
Kit, Wafer Size With platform, Optical, 200mm
EESI Part #:
2300-00093
Description:
Kit, Wafer Size With Platform, Optical, 150mm
EESI Part #:
2300-00016
Description:
Harness Assembly, Sensor 26.5"
EESI Part #:
2300-00097
Description:
Indexer Assy, Left, C2
EESI Part #:
2300-00098
Description:
Indexer Assy, Right C2
EESI Part #:
2300-00115
Description:
12" Spindle Assy
EESI Part #:
2300-00113
Description:
Pedestal Heater Referb.
EESI Part #:
2300-00116
Description:
12" Spindle Assy
EESI Part #:
2300-00094
Description:
Microcontacmination Upgrade
EESI Part #:
2300-00095
Description:
Station, Cooling Upgrade
EESI Part #:
2300-00096
Description:
External Heated Gate & Throttle Valves
EESI Part #:
2300-00103
Description:
Showerhead Disk
EESI Part #:
2300-00106
Description:
Showerhead 150mm Bottom
EESI Part #:
2300-00105
Description:
Window 10"
EESI Part #:
2300-00017
Description:
Insulator, Gas Distribution
EESI Part #:
2300-00018
Description:
Guide, Nozzle Adjuster
EESI Part #:
2300-00111
Description:
Guide Nozzle Adjuster
EESI Part #:
2300-00023
Description:
Nut, Cap, 1/4-20, Ni
EESI Part #:
2300-00019
Description:
Adjuster, Ceramic, Gas Plate
EESI Part #:
2300-00020
Description:
Nut, Hex, 1/2-20, Alum
EESI Part #:
2300-00021
Description:
Hanger, Nozzle, 1.33" (150mm)
EESI Part #:
2300-00022
Description:
Hanger, Nozzle, 1.50" (200mm)
EESI Part #:
2300-00122
Description:
Nut Cap 1/4-20, Ni
EESI Part #:
2300-00024
Description:
Screw, 1/4-20 x 1/4, Ni
EESI Part #:
2300-00025
Description:
Nut, Hex, 1/4-20, Ni
EESI Part #:
2300-00026
Description:
Washer, 1/4" Ni
EESI Part #:
2300-00027
Description:
Nut, 10-32 Ni
EESI Part #:
2300-00028
Description:
Washer, Flat, #10, Ni
EESI Part #:
2300-00008
Description:
Screw 200 (0.5)
EESI Part #:
2300-00029
Description:
Screw, Top spindle, Ni
EESI Part #:
2300-00030
Description:
Screw, Top spindle, Ni
EESI Part #:
2300-00031
Description:
Screw, 1.02LG, Top Spindle, Ni
EESI Part #:
2300-00032
Description:
Screw, 1.12LG Top spindle, Ni
EESI Part #:
2300-00005
Description:
Screw
EESI Part #:
2300-00033
Description:
Insulator, Gas Feedthrough Ceramic
EESI Part #:
2300-00034
Description:
Ring, Heater Hub, Ceramic
EESI Part #:
2300-00035
Description:
Ring, Heater Centering, Ceramic
EESI Part #:
2300-00036
Description:
Bracket, Paddle, 150mm
EESI Part #:
2300-00042
Description:
Shim, Heater, .005", V-Type, Nickel Based
EESI Part #:
2300-00043
Description:
Shim, Heater, .010", V-Type, Nickel Based
EESI Part #:
2300-00044
Description:
Shim, Heater, .018", V-Type, Nickel Based
EESI Part #:
2300-00045
Description:
Shim, Heater, .025", V-type, Nickel Based
EESI Part #:
2300-00046
Description:
Shim, Heater, .031" V-Type, Nickel Based
EESI Part #:
2300-00037
Description:
Shim, Heater, .005", Flat, Nickel Based
EESI Part #:
2300-00038
Description:
Shim, heater, .010", Flat, Nickel Based
EESI Part #:
2300-00039
Description:
Shim, Heater, .018", Flat, Nickel Based
EESI Part #:
2300-00040
Description:
Shim, Heater, .025", Flat, Nickel Based
EESI Part #:
2300-00041
Description:
Shim, Heater, .031", Flat, Nickel Based
EESI Part #:
2300-00047
Description:
Sleeve, Heater Lead, 2.00", Ceramic
EESI Part #:
2300-00048
Description:
Sleeve, Heater Lead, 2.75", Ceramic
EESI Part #:
2300-00102
Description:
Alumina Short Tube
EESI Part #:
2300-00049
Description:
Tube, TC, 1/8" ID, Ceramic
EESI Part #:
2300-00051
Description:
Clamp, spindle Hub Mount
EESI Part #:
2300-00052
Description:
Clamp, Rotation Adjustment
EESI Part #:
2300-00050
Description:
Sleeve, Flanged, AC Feedthrough, Ceramic
EESI Part #:
2300-00053
Description:
Sleeve, TC Ceramic
EESI Part #:
2300-00054
Description:
Cap, TC, 1/16" ID, Ceramic
EESI Part #:
2300-00055
Description:
Feedthrough, 3/8: O-Seal, UltraTorr
EESI Part #:
2300-00056
Description:
Washer, Feedthrough, 1/2" ID, Alum
EESI Part #:
2300-00057
Description:
Fork Screw, Ni
EESI Part #:
2300-00001
Description:
Clamp for Concept I/II
EESI Part #:
2300-00058
Description:
Fork, Finger, 150mm
EESI Part #:
2300-00059
Description:
Fork finger, 200mm
EESI Part #:
2300-00060
Description:
Plate, fork Retainer, Bottom, 200mm
EESI Part #:
2300-00061
Description:
Plate, Fork Retainer, Bottom, 150mm
EESI Part #:
2300-00062
Description:
Plate, Fork Retainer, Top, 200mm
EESI Part #:
2300-00063
Description:
Plate, Fork Retainer, Top, 150mm
EESI Part #:
2300-00010
Description:
Nickel Bolt Screw
EESI Part #:
2300-00064
Description:
Washer, #8, Ni
EESI Part #:
2300-00065
Description:
Clamp, Flat
EESI Part #:
2300-00066
Description:
Flange, Keyed (Replaced by 15-032631)
EESI Part #:
2300-00067
Description:
Bushing, Keyed, Ceramic
EESI Part #:
2300-00068
Description:
Tube, TC Ceramic
EESI Part #:
2300-00069
Description:
Cup, Screw Cover
EESI Part #:
2300-00070
Description:
Paddle, Optical 150mm
EESI Part #:
2300-00071
Description:
Bracket, Paddle, 200mm
EESI Part #:
2300-00072
Description:
Paddle, Optical, 200mm
EESI Part #:
2300-00073
Description:
Panel, side LL
EESI Part #:
2300-00074
Description:
Window, Quartz, Etch Resistant Sapphire Coated
EESI Part #:
2300-00075
Description:
Flange, Keyed
EESI Part #:
2300-00076
Description:
Min contact Area, Fork, 150mm
EESI Part #:
2300-00077
Description:
Min Contact Area, Fork, 200mm
EESI Part #:
2300-00002
Description:
Rod Sapphire
EESI Part #:
2300-00009
Description:
Washer #10 Nickel
EESI Part #:
2300-00099
Description:
Clamp Strap Feed thru
EESI Part #:
2300-00006
Description:
Cup
EESI Part #:
2300-00100
Description:
Clamp RF Strap Aluminum
EESI Part #:
2300-00003
Description:
Window Sapphire
EESI Part #:
2300-00007
Description:
Screw
EESI Part #:
2300-00004
Description:
Rod Sapphire
EESI Part #:
2300-00101
Description:
Anode, Copper 8" Round
EESI Part #:
2300-00078
Description:
Wire, Insulated, Ceramic Bead, Short
EESI Part #:
2300-00079
Description:
Wire, Insulated, Ceramic Bead, Long
EESI Part #:
2300-00080
Description:
Showerhead, Pinned, 200mm
EESI Part #:
2300-00011
Description:
150mm Showerhead
