EESI Part #:
2300-00119
Description:
300mm Shower Head
EESI Part #:
2300-00117
Description:
12"PreClean pedestal bellows
EESI Part #:
2300-00120
Description:
300mm Shower Head
EESI Part #:
2300-00121
Description:
300mm Shower Head
EESI Part #:
2300-00081
Description:
Strap, LF Bias, Laum
EESI Part #:
2300-00082
Description:
Spring, Fork
EESI Part #:
2300-00107
Description:
Showerhead Upper Chamber
EESI Part #:
2300-00104
Description:
Plate Middle Showerhead
EESI Part #:
2300-00108
Description:
Showerhead Lower Chamber
EESI Part #:
2300-00112
Description:
Quartz Plate
EESI Part #:
2300-00083
Description:
Feedthrough Assy, Electrical
EESI Part #:
2300-00084
Description:
Ball, Heater Support, 2.00", Ceramic
EESI Part #:
2300-00085
Description:
Nut, 8-32 UNC-2B, Alum
EESI Part #:
2300-00086
Description:
Elbow, Union, 3/8" O-Seal
EESI Part #:
15-00935-01
Description:
Screw, 10-32 X .50 LG, NI
EESI Part #:
15-176989-00 rev C
Description:
Chamber, Plasma Unified Tube Quartz
EESI Part #:
15-177241-00 Rev A
Description:
Shield Sleeve Ultra Torr Quartz
EESI Part #:
06-0091-3
Description:
Elbow 3/4 OD
EESI Part #:
2300-00087
Description:
Thermocouple, Type J, 1/8"
EESI Part #:
2300-00088
Description:
Thermocouple, Type J, 1/16"
EESI Part #:
2300-00089
Description:
Thermocouple, Type E, LG
EESI Part #:
2300-00090
Description:
Sealant, Teflon FT (used in 19-00056-00)
EESI Part #:
2300-00091
Description:
Filter, Backfill
EESI Part #:
2300-00118
Description:
12" Welded Bellow
EESI Part #:
2300-00109
Description:
Plasma Tube Gasonic A1000
EESI Part #:
2300-00110
Description:
Window Vented 9.5"
