EESI Part #:
2800-00240
Description:
Quartz Plasma Chamber
EESI Part #:
2800-00200
Description:
Bubbler Quartz
EESI Part #:
2800-00193
Description:
Pin Lift Quartz
EESI Part #:
2800-00387
Description:
Rod Diffuser Quartz Lamp
EESI Part #:
2800-00194
Description:
Plate Quartz Lamp
EESI Part #:
2800-00239
Description:
Top Plate Quartz
EESI Part #:
2800-00195
Description:
Spool Quartz
EESI Part #:
2800-00196
Description:
Plate Gas Dist 6”
EESI Part #:
2800-00197
Description:
Plate Diffuser Quartz
EESI Part #:
2800-00199
Description:
Gas Distribution Plate 200mm
EESI Part #:
2800-00092
Description:
Liner Ceramic, 100-150mm, CHMBR 2, 4, Upper Electrode(Drytek)
EESI Part #:
715-011913-080
Description:
Lower Baffle
EESI Part #:
716-011830-005
Description:
Focus Ring Ceramic (W/C) Semi 5"
EESI Part #:
718-043893-801
Description:
ESC 8" MOD ELCTD CAP Notched
EESI Part #:
716-331157-414
Description:
Disk Top Gas DSIE BSI
EESI Part #:
715-011913-083
Description:
Plate Baffle Lower
EESI Part #:
716-023013-005
Description:
Hot Edge Ring
EESI Part #:
716-331100-001
Description:
Ceramic Edge Ring 6” FL Bottom
EESI Part #:
716-028454-816
Description:
Chamber Lid
EESI Part #:
716-012340-012
Description:
Window Gas Inject Face Seal
EESI Part #:
716-051195-005
Description:
Quartz Plate Support Heater
EESI Part #:
716-072165-002
Description:
Quartz Ring
EESI Part #:
716-052685-001
Description:
Quartz Window
EESI Part #:
716-071348-001
Description:
Microwave Intro Quartz Window
EESI Part #:
716-072165-005
Description:
Quartz Ring Apiture 185mm
EESI Part #:
713-020911-102
Description:
Plunger Wafer Clamp-Upper
EESI Part #:
716-331142-202
Description:
Ring Edge Top Wide
EESI Part #:
716-011758-014
Description:
Ring Edge Focus Orifice Combo 4.0
EESI Part #:
2800-00091
Description:
Pin, Lift Lower Electrode (Drytek)
EESI Part #:
2800-00361
Description:
PCB Index Dual SNSR (X)
EESI Part #:
2800-00270
Description:
Teflon Shroud
EESI Part #:
2800-00271
Description:
Plunger Wafer Clamp Upper
EESI Part #:
2800-00272
Description:
Clamp Retaining Nut
EESI Part #:
2800-00282
Description:
Retainer Washer
EESI Part #:
2800-00273
Description:
Plunger Guide Sleeve
EESI Part #:
2800-00274
Description:
Plunger Guide
EESI Part #:
2800-00128
Description:
Cover Clamp Bolt "A"
EESI Part #:
2800-00129
Description:
Cap Bolt Clamp Retain
EESI Part #:
2800-00241
Description:
Insert, Vespel Ring
EESI Part #:
2800-00275
Description:
Pin Clamp Alignment Head
EESI Part #:
2800-00041
Description:
Vespel Confinement Ring
EESI Part #:
2800-00385
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00375
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00378
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00365
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00344
Description:
Talon Gaskets 300mm
EESI Part #:
2800-00366
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00369
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00381
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00382
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00374
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00352
Description:
ABE Gaskets
EESI Part #:
2800-00370
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00371
Description:
LAM 12" Flex LRC Gaskets
EESI Part #:
2800-00088
Description:
Electrode Aluminum Anodized
EESI Part #:
2800-00242
Description:
Lower Electrode 6", 4 pin
EESI Part #:
2800-00090
Description:
Electrode Lower 8" 4-Pin
EESI Part #:
2800-00243
Description:
Lower Electrode 6", 4 pin
EESI Part #:
2800-00089
Description:
Electrode Aluminum Anodized
EESI Part #:
2800-00269
Description:
RING FOCUS 6"
EESI Part #:
2800-00026
Description:
Ring Outer Anodized
EESI Part #:
2800-00087
Description:
Cap Electrode
EESI Part #:
2800-00265
Description:
Upper Electrode
EESI Part #:
2800-00024
Description:
Electrode Aluminum Anodized 6"
EESI Part #:
2800-00025
Description:
Electrode Aluminum Anodized 8"
EESI Part #:
2800-00244
Description:
Electrode
EESI Part #:
2800-00245
Description:
Electrode 8",
EESI Part #:
2800-00232
Description:
Electrode Upper 6"
EESI Part #:
2800-00246
Description:
Electrode 6"
EESI Part #:
2800-00136
Description:
CLAMP, WAFER, DOMED, CERAMIC, 6", 1-FLAT, 4500
EESI Part #:
2800-00410
Description:
Clamp Retaining Bolt
EESI Part #:
2800-00127
Description:
Bolt Clamp Rtng
EESI Part #:
2800-00389
Description:
Lifter 4 Pin Memory Metal
EESI Part #:
2800-00266
Description:
Upper Electrode
EESI Part #:
2800-00247
Description:
Focus Ring 4"
EESI Part #:
2800-00018
Description:
Fing, Focus Anodized (Semi 6")
EESI Part #:
2800-00276
Description:
Cap Lower Electrode 4"
EESI Part #:
2800-00248
Description:
Lower Electrode 5",
EESI Part #:
2800-00249
Description:
Plate Wafer Clamp 4"
EESI Part #:
2800-00250
Description:
Plate Wafer Clamp 5"
EESI Part #:
2800-00205
Description:
Aluminum Plate Wafer Clamp 6"
EESI Part #:
2800-00277
Description:
Bolt Capped Clamp Retaining
EESI Part #:
2800-00010
Description:
Shower Head
EESI Part #:
2800-00252
Description:
Electrode Upper 8"
EESI Part #:
2800-00019
Description:
Upper Electrode 6"
EESI Part #:
2800-00251
Description:
Electrode Upper 8"
EESI Part #:
2800-00434
Description:
ELCTD, ALUM, ANDZ, 6"
EESI Part #:
2800-00253
Description:
Shroud 6" 2 mil hard
EESI Part #:
2800-00388
Description:
Plate Upper Seal (8" Elect.) BF, LW, INT Pl anode
EESI Part #:
2800-00254
Description:
Showerhead 6"
EESI Part #:
2800-00255
Description:
Wafer Clamp 6"
EESI Part #:
2800-00256
Description:
BSR Injection Ring
EESI Part #:
2800-00084
Description:
Chamber Liner
EESI Part #:
2800-00264
Description:
Lower Electrode
EESI Part #:
2800-00430
Description:
Upper Baffle
EESI Part #:
2800-00278
Description:
Baffle Lower
EESI Part #:
2800-00429
Description:
Middle Baffle
EESI Part #:
2800-00137
Description:
Coupling Ring, Ceramic. Ref. 715-140153-001.
EESI Part #:
2800-00257
Description:
Non-Contact Wafer Clamp
