EESI Part #:
2800-00258
Description:
Electrode Lower 6"
EESI Part #:
2800-00259
Description:
Electrode Lower 8"
EESI Part #:
2800-00260
Description:
Gas Injection Ring
EESI Part #:
2800-00001
Description:
Frog Leg
EESI Part #:
2800-00002
Description:
Frog Leg Rework
EESI Part #:
2800-00261
Description:
BSR Injection Ring
EESI Part #:
2800-00003
Description:
Chamber Liner
EESI Part #:
2800-00004
Description:
Chamber Liner Rework
EESI Part #:
2800-00390
Description:
Ring Alum Insulator Lam 9600
EESI Part #:
2800-00005
Description:
Chamber Liner
EESI Part #:
2800-00006
Description:
Chamber Liner
EESI Part #:
2800-00007
Description:
Chamber Liner
EESI Part #:
2800-00262
Description:
BSR Injection Ring
EESI Part #:
2800-00263
Description:
BSR Injection Ring
EESI Part #:
2800-00086
Description:
Al, Hot Edge Ring
EESI Part #:
2800-00008
Description:
Slit Door Liner Reanodise only
EESI Part #:
2800-00009
Description:
Slit Door Liner Rework
EESI Part #:
2800-00085
Description:
Chamber Liner (2300Metal_AL)
EESI Part #:
2800-00055
Description:
Quartz Plasma Disk Baffle
EESI Part #:
2800-00138
Description:
CERAMIC DISK
EESI Part #:
2800-00393
Description:
Ring Ceramic Edge Oxide
EESI Part #:
2800-00421
Description:
IOZ 8 Hole Ceramic 2300 Metal
EESI Part #:
2800-00077
Description:
Ring, Hot Edge, Si DFC, 300mm
EESI Part #:
2800-00076
Description:
Ring, Hot Edge, Si, 300mm
EESI Part #:
2800-00080
Description:
Ring, Hot Edge, Si, 300mm
EESI Part #:
2800-00326
Description:
Quartz Face Outer Electrode
EESI Part #:
2800-00339
Description:
Edge Ring (Metal Chamber)
EESI Part #:
2800-00293
Description:
Ring Quartz Upper
EESI Part #:
2800-00069
Description:
Pl CVR Step Qtz 200mm 2300 Exelan
EESI Part #:
2800-00093
Description:
3-Hole Ring
EESI Part #:
2800-00139
Description:
Insulator Ring
EESI Part #:
2800-00094
Description:
Insulator Ring
EESI Part #:
2800-00140
Description:
Ceramic Insulator Ring. Reference 716-006753-001
EESI Part #:
2800-00211
Description:
Ring Quartz Upper HPT
EESI Part #:
2800-00425
Description:
Ring Quartz Upper HPT
EESI Part #:
2800-00303
Description:
Ring Quartz Upper HPT
EESI Part #:
2800-00189
Description:
IEP Window Sapphire Gas Injector
EESI Part #:
2800-00011
Description:
Window With Step
EESI Part #:
2800-00023
Description:
Cover Ring Quartz HP
EESI Part #:
2800-00426
Description:
Cover Ring Quartz HP
EESI Part #:
2800-00304
Description:
Cover Ring Quartz HP
EESI Part #:
2800-00060
Description:
Quartz Gas Injector
EESI Part #:
2800-00228
Description:
Disk Diffuser Duocel 6"
EESI Part #:
2800-00012
Description:
Window Sapphire
EESI Part #:
2800-00028
Description:
Window Quartz
EESI Part #:
2800-00400
Description:
Window 7.75 x 1.5.x .25 - In Sapphire
EESI Part #:
2800-00095
Description:
Orifice Ring
EESI Part #:
2800-00413
Description:
Ring Filler Upper Alum
EESI Part #:
2800-00030
Description:
DSQ Quartz Window
EESI Part #:
2800-00031
Description:
DSQ Quartz Spacer
EESI Part #:
2800-00300
Description:
Spacer Quartz P.R. (DSQ)
EESI Part #:
2800-00096
Description:
3-Hole Ring
EESI Part #:
2800-00022
Description:
NSG-OZ Quartz Window
EESI Part #:
2800-00097
Description:
Ring Upper Electrode Insulator Ceramic
EESI Part #:
2800-00391
Description:
Ring Ceramic Face Upper Electrode Lam 4400
EESI Part #:
2800-00098
Description:
Clamp Ring 6"
EESI Part #:
2800-00217
Description:
Plate Wafer Clamp 6" Dome
EESI Part #:
2800-00141
Description:
ORIFICE FILLER W/C CERAMIC
EESI Part #:
2800-00142
Description:
CERAMIC WASHER
EESI Part #:
2800-00143
Description:
CERAMIC RETAINER CLAMP, 1/4 TURN
EESI Part #:
2800-00216
Description:
Clamp Retainer, 1/4 Turn
EESI Part #:
2800-00144
Description:
CERAMIC PLUNGER, SHORT
EESI Part #:
2800-00145
Description:
Ceramic Plunger, 1/4 Turn
EESI Part #:
2800-00146
Description:
CERAMIC PLUNGER LONG
EESI Part #:
2800-00279
Description:
Plate Clamp 4"
EESI Part #:
2800-00392
Description:
Plate Teflon Seal Chamber Lifter
EESI Part #:
2800-00283
Description:
Ring Filter Ceramic
EESI Part #:
2800-00342
Description:
Ring Ceramic
EESI Part #:
2800-00099
Description:
Lower Combo Ring, 6"
EESI Part #:
2800-00147
Description:
RING, MOUNTING, CERAMIC
EESI Part #:
2800-00218
Description:
Plate Wafer Clamp 8" Dome No Flat
EESI Part #:
2800-00394
Description:
Ring Focus Ceramic 6"
EESI Part #:
2800-00100
Description:
Upper Electrode CeramicNg, 6"
EESI Part #:
2800-00101
Description:
Clamp Attachment Ring 6"
EESI Part #:
2800-00224
Description:
Ring Quartz Coupling 300mm
EESI Part #:
2800-00132
Description:
RING,QTZ,COUPLING,HI EDGE,300MM
EESI Part #:
2800-00173
Description:
RING,QTZ,COUPLING,HI EDGE,300MM
EESI Part #:
2800-00318
Description:
Injector 1 CTR 8 RDL Quartz NSG
EESI Part #:
2800-00042
Description:
Noz, Inj, 8X.055-45 Deg RD
EESI Part #:
2800-00440
Description:
NOZZLE, INJ. 8x, .055-45DEG RDL-1CTR
EESI Part #:
2800-00180
Description:
NOZZLE, INJ. 8x, .055-45DEG RDL-1CTR
EESI Part #:
2800-00043
Description:
Window Gas Inj, Face Seal, Qtz, NSG
EESI Part #:
2800-00044
Description:
Window Gas Inj, Face Seal, QR
EESI Part #:
2800-00175
Description:
WINDOW,GAS INJ,FACE SEAL,QRTZ,NSG
EESI Part #:
2800-00045
Description:
Ring Cover Outer GND
EESI Part #:
2800-00174
Description:
RING,COVER,OUTER,GND
EESI Part #:
2800-00315
Description:
SP IEP Optics 2, 4 Long NSG
EESI Part #:
2800-00046
Description:
Cover H/E Ring Quartz
EESI Part #:
2800-00178
Description:
Cover H/E Ring Quartz 300mm
EESI Part #:
2800-00214
Description:
Cover H/E Ring Quartz
EESI Part #:
2800-00013
Description:
Liner Sapphire
EESI Part #:
2800-00047
Description:
6 Ring WAP Qtz Generic 17" DFC 300mm
EESI Part #:
2800-00133
Description:
RING,WAP,QTZ,GENERIC,17IN,DFC
EESI Part #:
2800-00441
Description:
RING,WAP,QTZ,GENERIC,17IN,DFC
EESI Part #:
2800-00181
Description:
RING,WAP,QTZ,GENERIC,17IN,DFC
EESI Part #:
2800-00183
Description:
Ring WAP Thk
EESI Part #:
2800-00330
Description:
Ring Confinement One Piece HPT
EESI Part #:
2800-00405
Description:
Ring Confinement One Piece HPT
EESI Part #:
2800-00415
Description:
Ring Confinement One Piece HPT
