EESI Part #:
2900-00013
Description:
Diffuser Clean Port ULTIMA
EESI Part #:
2900-00014
Description:
Insert Chamber Slit Valve ULTIMA
EESI Part #:
2900-11533
Description:
300mm Blocker Plate
EESI Part #:
2900-10826
Description:
Nozzle Washers
EESI Part #:
2900-00015
Description:
Slit Valve Plate MXP Etcher
EESI Part #:
2900-00016
Description:
Slit Door Liner MXP Etcher
EESI Part #:
2900-00017
Description:
Clamp Ring 8"
EESI Part #:
2900-11333
Description:
Heater Isolator Ceramic
EESI Part #:
2900-11661
Description:
Stand-Off Ceramic DC Bias
EESI Part #:
2900-11148
Description:
Deposition Ring 300MM ESC
EESI Part #:
2900-10858
Description:
Viewport Window
EESI Part #:
2900-10261
Description:
Window Quartz Protective
EESI Part #:
2900-11406
Description:
Lift Insulator Spacer
EESI Part #:
2900-11778
Description:
Washer Insulator
EESI Part #:
2900-10238
Description:
Viewport, Side Quartz
EESI Part #:
2900-00018
Description:
Clamp Ring 8"
EESI Part #:
2900-00019
Description:
Clamp Ring 8"
EESI Part #:
2900-00020
Description:
Clamp Ring 8"
EESI Part #:
2900-00021
Description:
Clamp Ring 8"
EESI Part #:
2900-00022
Description:
Clamp Ring 8"
EESI Part #:
2900-11084
Description:
Insulator Source 11.3"
EESI Part #:
2900-00023
Description:
Clamp Ring 8"
EESI Part #:
2900-10866
Description:
AL Clamp Ring
EESI Part #:
2900-00047
Description:
Clamp Ring 8"
EESI Part #:
2900-00025
Description:
Insulator Source 13"
EESI Part #:
2900-00026
Description:
Bracket Shield TiN
EESI Part #:
2900-00027
Description:
Clamp Ring 8"
EESI Part #:
2900-00028
Description:
Pedestal Shield Preclean
EESI Part #:
2900-10258
Description:
Preclean Pin
EESI Part #:
2900-11822
Description:
150mm Preclean Pedestal Shield
EESI Part #:
2900-10844
Description:
Basic Bellows
EESI Part #:
2900-10803
Description:
Ceramic Insulator Source Ring, 8"
EESI Part #:
2900-00029
Description:
Adaptor TiN
EESI Part #:
2900-00030
Description:
Clamp Shield
EESI Part #:
2900-11349
Description:
Upper Shield
EESI Part #:
2900-11407
Description:
Washer Insulator
EESI Part #:
2900-11085
Description:
Washer Insulator Spacer Ceramic
EESI Part #:
2900-11828
Description:
150mm Cover Ring
EESI Part #:
2900-10300
Description:
Quartz Insulator
EESI Part #:
2900-11139
Description:
Shield, Upper, AL ARC-Spray, SST, 300mm
EESI Part #:
2900-00031
Description:
Clamp Ring 6"
EESI Part #:
2900-11673
Description:
Quartz Finger
EESI Part #:
2900-00032
Description:
Collimator .625 Thick
EESI Part #:
2900-00033
Description:
Pin Antenna PCII
EESI Part #:
2900-10232
Description:
Insulator Quartz 8" Preclean
EESI Part #:
2900-10746
Description:
Clip Spring PC II Antenna Dowell (Min Order Required)
EESI Part #:
2900-10817
Description:
Clip Antenna
EESI Part #:
2900-11830
Description:
150mm 101 Pedestal
EESI Part #:
2900-00034
Description:
Clamp Ring 8"
EESI Part #:
2900-10245
Description:
Insulator Quartz 6" JMF PCII EXT
EESI Part #:
2900-00035
Description:
Collimator .750 Thick
EESI Part #:
2900-11823
Description:
150mm ESC Lower Shield
EESI Part #:
2900-00036
Description:
Cover Ring 8"
EESI Part #:
2900-00037
Description:
Clamp Ring 8"
EESI Part #:
2900-10725
Description:
Isolator DC Bias Shuttercomp
EESI Part #:
2900-00038
Description:
Clamp Ring 8"
EESI Part #:
2900-00039
Description:
Clamp Ring 8"
EESI Part #:
2900-10719
Description:
InsulatorTi/TIN Durasource-TTN
EESI Part #:
2900-10262
Description:
Insulator Ti/TiN Durasource TTN Ceramic
EESI Part #:
2900-10186
Description:
Lower Shield
EESI Part #:
2900-10890
Description:
6" B101 Lower Shield
EESI Part #:
2900-00040
Description:
Clamp Ring 8"
EESI Part #:
2900-11380
Description:
Ceramic Tube
EESI Part #:
2900-10889
Description:
6" B101 Shutter Disc
EESI Part #:
2900-00041
Description:
Clamp Ring 8"
EESI Part #:
2900-00042
Description:
Gas Trench Cover PC II
EESI Part #:
2900-00043
Description:
Shutter Disk 8"
EESI Part #:
2900-00044
Description:
Clamp Ring 8"
EESI Part #:
2900-00045
Description:
Clamp Ring 6"
EESI Part #:
2900-00046
Description:
Clamp Ring 6" 4 pads
EESI Part #:
2900-11637
Description:
Isolator MOD DC Bias Dura TTN Shut
EESI Part #:
2900-11389
Description:
Insulator Quartz 8" Preclean II
EESI Part #:
2900-10736
Description:
Pedestal PCII 8" SNNF
EESI Part #:
2900-10870
Description:
TI Clamp Ring
EESI Part #:
2900-00024
Description:
Titanium Clamp Ring 200mm
EESI Part #:
2900-10868
Description:
Titanium Clamp Ring 150mm
EESI Part #:
2900-00048
Description:
Clamp Ring 8"
EESI Part #:
2900-00049
Description:
Clamp Ring 8"
EESI Part #:
2900-00050
Description:
Clamp Ring 8"
EESI Part #:
2900-00051
Description:
Clamp Ring 8"
EESI Part #:
2900-00052
Description:
Clamp Ring 8"
EESI Part #:
2900-11647
Description:
Pedestal A101 HI-PWR POIS COH-TITIN
EESI Part #:
2900-11009
Description:
SS Upper Shield W/Arc Spray
EESI Part #:
2900-10867
Description:
TI Clamp Ring
EESI Part #:
2900-00053
Description:
Clamp Ring 8"
EESI Part #:
2900-00054
Description:
Shield Clamp IMP
EESI Part #:
2900-11467
Description:
Cup Outer Feed thru Support SST Recessed Vectra
EESI Part #:
2900-00055
Description:
Clamp Ring 8"
EESI Part #:
2900-11466
Description:
Clamp Feed thru Coil Support 1.365" L Vectra-IMP
EESI Part #:
2900-11626
Description:
Blocker, perf, TEOS Oxide 8"
EESI Part #:
2900-11777
Description:
Pumping Plate 4.5 & 6" Nitride Giant Gap
EESI Part #:
2900-11081
Description:
Showerhead GGN 6" AMT 5000
EESI Part #:
2900-00056
Description:
Blocker Plate 200mm
EESI Part #:
2900-00057
Description:
Pedestal Poly 8"
EESI Part #:
2900-11552
Description:
Cover
EESI Part #:
2900-10804
Description:
Tube External Tapered EXT Cathode
EESI Part #:
2900-00058
Description:
GDP 133 Holes
EESI Part #:
2900-11602
Description:
PLATE, PERF CONFORMAL SILANE NITRIDE 200MM
EESI Part #:
2900-11656
Description:
Housing for Quartz Tube SACVD
EESI Part #:
2900-11021
Description:
GDP Vespel Plugs
